Title :
Thin-film microaxicon arrays for beam-shaping and characterization of vacuum ultraviolet lasers
Author :
Grunwald, U. ; Neumann, U. ; Kebbel, V. ; Kuhn, H.-J. ; Mann, K.
Author_Institution :
Max-Born-Inst. for Nonlinear Opt. & Short-Pulse Spectrosc., Berlin, Germany
Abstract :
In this paper, we present recent results of designing, characterizing and testing microaxicon arrays capable to shape laser beams at wavelengths as short as 157 nm (fluorine laser). The defined wavefronts and intensity distributions of excimer lasers and higher harmonics of solid state lasers have to be generated. The optimization of spectral characteristics, laser resistance and surface quality is a demanding task for design and technology of such components.
Keywords :
excimer lasers; fluorine; laser beams; micro-optics; optical design techniques; solid lasers; ultraviolet spectra; 157 nm; F; excimer lasers; fluorine laser; intensity distribution; laser beam-shaping; laser resistance; solid state lasers; spectral characteristics; surface quality; testing microaxicon array; thin-film microaxicon array; vacuum ultraviolet lasers; wavefront distribution; Design optimization; Laser beams; Optical arrays; Optical design; Optical harmonic generation; Shape; Solid lasers; Surface resistance; Testing; Transistors;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313730
