Thin-film microaxicon arrays for beam-shaping and characterization of vacuum ultraviolet lasers

Author

Grunwald, U. ; Neumann, U. ; Kebbel, V. ; Kuhn, H.-J. ; Mann, K.

Author_Institution

Max-Born-Inst. for Nonlinear Opt. & Short-Pulse Spectrosc., Berlin, Germany

fYear

2003

fDate

22-27 June 2003

Firstpage

673

Abstract

In this paper, we present recent results of designing, characterizing and testing microaxicon arrays capable to shape laser beams at wavelengths as short as 157 nm (fluorine laser). The defined wavefronts and intensity distributions of excimer lasers and higher harmonics of solid state lasers have to be generated. The optimization of spectral characteristics, laser resistance and surface quality is a demanding task for design and technology of such components.

Keywords

excimer lasers; fluorine; laser beams; micro-optics; optical design techniques; solid lasers; ultraviolet spectra; 157 nm; F; excimer lasers; fluorine laser; intensity distribution; laser beam-shaping; laser resistance; solid state lasers; spectral characteristics; surface quality; testing microaxicon array; thin-film microaxicon array; vacuum ultraviolet lasers; wavefront distribution; Design optimization; Laser beams; Optical arrays; Optical design; Optical harmonic generation; Shape; Solid lasers; Surface resistance; Testing; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on

Print_ISBN

0-7803-7734-6

Type

conf

DOI

10.1109/CLEOE.2003.1313730

Filename

1313730