Predictive simulation of microdevices and microsystems: The basis of virtual prototyping

The rapid progress in microsystems technology is increasingly supported by MEMS-specific modeling methodologies and dedicated simulation tools. These do not only enable the visualization of fabrication processes and operational principles, but they also assist the designer in making decisions with a view to finding optimized microstructures under technological and economical constraints. Currently strong efforts are being made towards simulation platforms for the predictive simulation of microsystems, i.e. the "virtual fabrication" and "virtual experimentation and characterization" on the computer. We discuss the most important aspects to be focussed on and practicable methodologies for microdevice and system modeling, in particular the consistent treatment of coupled fields and coupled domains required for setting up physically-based models for full system mixed-level simulation, and for the reliable validation and accurate calibration of the models.