Title :
Design of a prototype of a 3-axis capacitive acceleration sensor
Author :
Szaniawski, K. ; Napieralski, A. ; Sekalski, P. ; Podsiadly, P.
Author_Institution :
Dept. of Microelectron. & Comput. Sci., Tech. Univ. Lodz, Poland
Abstract :
The paper describes a prototype of a 3-axis surface-micromachined capacitive microaccelerometer, which is supposed to measure low-g turbogenerator vibrations. The sensor is based on three separate, one-axis sensors with individual proof masses rather than on a single proof mass. The paper also provides estimation of sensor parameters, based on simulation results and analytical calculations.
Keywords :
acceleration measurement; accelerometers; capacitive sensors; frequency modulation; frequency response; micromachining; microsensors; 3-axis capacitive acceleration sensor; low-g turbogenerator vibrations; prototype design; surface-micromachined capacitive microaccelerometer; Acceleration; Accelerometers; Analytical models; Capacitance; Capacitive sensors; Capacitors; Electrodes; Prototypes; Sensor phenomena and characterization; Springs;
Conference_Titel :
Microelectronics, 2004. 24th International Conference on
Print_ISBN :
0-7803-8166-1
DOI :
10.1109/ICMEL.2004.1314599
