Bimaterial infrared detector with efficient suppression of interference from ambient temperature

We presents a novel design of MOEMS uncooled infrared detector based on the bimetal effect. Essentially, the detector consists of a kinematic mechanism with temperature sensitive elements, movable connecting bars and micro-mirror/IC-absorber. Mechanical, kinematical and thermal modeling shows us, that the detector is self-compensated, i.e. it is primarily sensitive to tiny temperature changes caused by incident IR radiation, and only slightly sensitive to the large ambient temperature variations. The suppression mechanism is of kinematic type, and does not degrade other detector parameters, especially the detector fill factor and sensitivity. The proposed mechanism is analyzed theoretically and experimental work is in the final stage.