Novel flow control concepts in microchannels

Author

Fushinobu, Kazuyoshi ; Tokushige, Masaya ; Nakata, Masashi ; Okazaki, Ken

Author_Institution

Dept. of Mech. & Control Eng., Tokyo Inst. of Technol., Japan

Volume

2

fYear

2004

fDate

1-4 June 2004

Firstpage

622

Abstract

A novel microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined numerically. Previously demonstrated microchannel structure is considered, and the effect of various parameters have been examined numerically. The numerical results confirms the importance of effectively creating lateral velocity component in the microchannel. The results also suggest design information of the length, position and material of channel wall patterning for maximizing mixing enhancement effect.

Keywords

alumina; channel flow; chemically reactive flow; flow control; flow visualisation; microfluidics; mixing; osmosis; silicon compounds; sputter deposition; thin films; Al₂O₃; SiO₂; channel wall patterning; electroosmotic flow driven liquid pumping; flow control; lateral velocity component; length design; maximizing mixing enhancement effect; microchannel structure; microfluidic mixing device; microsystems; position design; Chemical analysis; Chemical processes; Chemical technology; Control engineering; Dielectric constant; Dielectric materials; Diffusion processes; Fluid flow; Microchannel; Microfluidics;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal and Thermomechanical Phenomena in Electronic Systems, 2004. ITHERM '04. The Ninth Intersociety Conference on

Print_ISBN

0-7803-8357-5

Type

conf

DOI

10.1109/ITHERM.2004.1318343

Filename

1318343