• DocumentCode
    415868
  • Title

    Innovative packaging techniques for wearable applications using flexible silicon fibres

  • Author

    Healy, Thomas ; Donnelly, Julie ; Neill, Brendan O. ; Delaney, Kieran ; Dwane, Kevin ; Barton, John ; Alderman, John ; Mathewson, Alan

  • Author_Institution
    Nat. Microelectron. Res. Centre, Cork, Ireland
  • Volume
    2
  • fYear
    2004
  • fDate
    1-4 June 2004
  • Firstpage
    1216
  • Abstract
    A novel technology (A. Mathewson et al., Irish Preliminary Patent P129447) that has the potential to make current wearable electronics recede even further into the background of everyday life has been developed in the form of electronically functional fibres (EFF). This is achieved by building a device in silicon on insulator (SOI) (James B. Kou and Ker-Wei Su, CMOS VLSI Engineering Silicon on Insulator (SOI), Kluwer Academic Publishers, Boston, pp. 15-59, 1998) material and under-cutting the sacrificial SiO2 layer by means of an isotropic etch process to leave a freestanding functional fibre. A demonstration of functionality based on this technology was produced in the form of a PN diode on a fibre (T. Healy et al., IEEE 53rd Electron. Comp. and Tech. Conf., pp. 1119-1122, 2003). One of the key initial considerations involved with this technology is the interconnection of such flexible structures. One approach to resolving this issue is to use a flexible printed circuit board (PCB) and a conductive adhesive paste to interconnect the individual fibres. A prototype demonstration of this technology in the form of a flexible light emitting diode (LED) circuit, using the EFF as the resistor of the circuit, is presented in this publication.
  • Keywords
    adhesives; conducting polymers; etching; integrated circuit interconnections; integrated circuit packaging; light emitting diodes; portable instruments; printed circuits; resistors; semiconductor device packaging; silicon-on-insulator; wearable computers; EFF resistor; LED; PN diode on fibre; Si-SiO2; conductive adhesive paste; electronically functional fibres; flexible light emitting diode circuit; flexible printed circuit board; flexible silicon fibres; flexible structures; freestanding functional fibre; interconnection technology; isotropic etch process; packaging techniques; sacrificial SiO2 layer undercutting; silicon on insulator material; wearable applications; wearable electronics; CMOS technology; Electronics packaging; Electrons; Etching; Flexible printed circuits; Integrated circuit interconnections; Light emitting diodes; Optical fiber devices; Silicon on insulator technology; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2004. Proceedings. 54th
  • Print_ISBN
    0-7803-8365-6
  • Type

    conf

  • DOI
    10.1109/ECTC.2004.1319066
  • Filename
    1319066