Low temperature embedded capacitor fabrication

Author

Lok, Boon K. ; Lu, Albert Chee W ; Wai, Lai L. ; Fan, Wei ; Wong, Chee K. ; Wong, Kim H. ; Chee, M.C.

Author_Institution

Singapore Inst. of Manuf. Technol., Singapore

Volume

1

fYear

2004

fDate

1-4 June 2004

Firstpage

531

Abstract

Rapidly growing performance and mixed-signal integration is driving the need for product and component miniaturization in electronics applications. Integral passive technology is a potentially attractive solution to replace discrete passives. Capacitors are widely used for broad ranging applications including filtering, tuning and power decoupling. This paper presents the performance characterization of two low temperature processes that are compatible with organic substrates. RF characterization up to 10 GHz was performed to extract the impedance profile, effective capacitance and capacitance density parameters.

Keywords

capacitance; circuit tuning; dielectric thin films; electron device testing; low-temperature techniques; microwave devices; printed circuits; radiofrequency filters; thin film capacitors; 10 GHz; RF characterization; capacitance density; component miniaturization; effective capacitance; electronics applications; filtering capacitors; impedance profile; integral passive technology; low temperature embedded capacitor fabrication; low temperature processes; mixed-signal integration; organic substrate compatible processes; performance characterization; power decoupling capacitors; product miniaturization; tuning capacitors; Capacitance; Capacitors; Dielectric materials; Dielectric substrates; Dielectric thin films; Fabrication; Frequency; Impedance; Temperature; Thin film circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2004. Proceedings. 54th

Print_ISBN

0-7803-8365-6

Type

conf

DOI

10.1109/ECTC.2004.1319390

Filename

1319390