DocumentCode :
416237
Title :
Optical proximity correction (OPC)-friendly maze routing
Author :
Huang, Li-Da ; Wong, Martin D F
Author_Institution :
Universitiof Texas at Austin, Texas
fYear :
2004
fDate :
7-11 July 2004
Firstpage :
186
Lastpage :
191
Keywords :
Adaptive optics; Atmosphere; Costs; Lagrangian functions; Lithography; Manufacturing processes; Optical diffraction; Optical distortion; Photonic integrated circuits; Routing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Automation Conference, 2004. Proceedings. 41st
Conference_Location :
San Diego, CA, USA
ISSN :
0738-100X
Print_ISBN :
1-51183-828-8
Type :
conf
Filename :
1322468
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=416237
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