DocumentCode
416525
Title
Film thickness control applying MPC
Author
Uehara, Masatsugu ; Nakai, Yasuhiro ; Terao, Jiro ; Hirata, Hajime
Author_Institution
Toray Ind. Inc., Shiga, Japan
Volume
1
fYear
2003
fDate
4-6 Aug. 2003
Firstpage
409
Abstract
In film producing processes, controlling the film thickness is an important function and thickness control systems are provided in general film processes. We developed a new thickness control system using MPC (model predictive control). As the result of application to a film process the developed system could reduce start-up time and improve the evenness of thickness.
Keywords
films; manufacturing processes; predictive control; thickness control; film process; film producing processes; film thickness control; model predictive control;
fLanguage
English
Publisher
ieee
Conference_Titel
SICE 2003 Annual Conference
Conference_Location
Fukui, Japan
Print_ISBN
0-7803-8352-4
Type
conf
Filename
1323381
Link To Document