Title :
Pico-gram mass deviation detected by resonance frequency shift of AFM cantilever
Author :
Sone, Hayato ; Fujinuma, Yoshinori ; Hieida, Takashi ; Hosaka, Sumio
Author_Institution :
Gunma Univ., Japan
Abstract :
A micro sensor with a pico-gram mass resolution was researched by using atomic force microscope (AFM) cantilever. The mass deviation by the adsorbed molecules on the cantilever can be detected by measuring the resonance frequency shift of the cantilever. According to the measurements of the resonance frequency shift as a function of humidity, the process of water adsorption was observed with a pico-gram mass resolution.
Keywords :
atomic force microscopy; force measurement; frequency modulation; humidity; mass measurement; microsensors; AFM cantilever; atomic force microscope cantilever; force measurement; humidity function; mass measurement; microsensor; picogram mass deviation; picogram mass resolution; resonance frequency shift; water adsorption;
Conference_Titel :
SICE 2003 Annual Conference
Conference_Location :
Fukui, Japan
Print_ISBN :
0-7803-8352-4
