Accurate simulation of phase noise in RF MEMS VCOs

Author

Behera, Manas ; Kratyuk, Volodymyr ; Hu, Yutao ; Mayaram, Kartikeya

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA

Volume

3

fYear

2004

fDate

23-26 May 2004

Abstract

A coupled circuit and device simulator is presented for the accurate simulation of phase noise in RF MEMS VCOs. The numerical solution of device level equations is used to accurately compute the capacitance of a MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. In addition, the noise from the MEMS capacitor is combined with a nonlinear circuit-level noise analysis to determine the phase noise of the RF MEMS VCO. Simulations of an 800 MHz MEMS VCO implemented in a HP 0.8μm CMOS technology show good agreement with experimentally observed behaviour.

Keywords

CMOS integrated circuits; capacitors; circuit simulation; micromechanical devices; phase noise; radiofrequency oscillators; voltage-controlled oscillators; 0.8 microns; 800 MHz; CMOS technology; MEMS capacitor; RF MEMS VCO; accurate simulation; circuit simulator; circuit-level noise analysis; coupled circuit; device level equations; device simulator; noise simulation; nonlinear noise analysis; numerical solution; phase noise; CMOS technology; Capacitors; Circuit noise; Circuit simulation; Computational modeling; Coupling circuits; Micromechanical devices; Phase noise; Radiofrequency microelectromechanical systems; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2004. ISCAS '04. Proceedings of the 2004 International Symposium on

Print_ISBN

0-7803-8251-X

Type

conf

DOI

10.1109/ISCAS.2004.1328837

Filename

1328837