DocumentCode
419093
Title
Evolving neural networks using swarm intelligence for binmap classification
Author
Miguelanez, Emilio ; Zalzala, Ali M S ; Tabor, Paul
Author_Institution
Electr., Electron. & Comput. Eng., Heriot-Watt Univ., Edinburgh, UK
Volume
1
fYear
2004
fDate
19-23 June 2004
Firstpage
978
Abstract
An automatic defect classification system is introduced for electrical test analysis of semiconductor wafer using evolutionary algorithm techniques to construct radial basis function neural networks (RBF NNs) as a classifier. The parameters of a RBF NN (number of neurons, and their respective centers and radii) are often determined by hand or based on methods highly dependent on initial values. In this work, particle swarm optimization algorithm is implemented to build a RBF NN that solves this specific problem. As a primary input source to the network, the system employs electrical binmaps obtained from the test stage of the manufacturing process. To accomplish this task, a filtering algorithm is also implemented able to discard those wafermaps without pattern. The performance of the reported approach shows an outstanding e-bitmap classification rate. To evaluate the performance of the main algorithm, the system is tested also on the Australian credit card data set and the error rate obtained is comparable with the best algorithms found in the literature.
Keywords
evolutionary computation; integrated circuit manufacture; integrated circuit testing; pattern classification; radial basis function networks; Australian credit card data set; RBF NN; automatic defect classification system; binmap classification; e-bitmap classification; electrical binmaps; electrical test analysis; evolutionary algorithm; filtering algorithm; manufacturing process; particle swarm optimization algorithm; primary input source; radial basis function neural networks; semiconductor wafer; swarm intelligence; test stage; wafermaps; Algorithm design and analysis; Automatic testing; Evolutionary computation; Manufacturing processes; Neural networks; Neurons; Particle swarm optimization; Radial basis function networks; Semiconductor device testing; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Evolutionary Computation, 2004. CEC2004. Congress on
Print_ISBN
0-7803-8515-2
Type
conf
DOI
10.1109/CEC.2004.1330968
Filename
1330968
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