A horizontally integrated micromachined filter

Author

Harle, Lee ; Katehi, Linda P B

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

2

fYear

2004

fDate

6-11 June 2004

Firstpage

437

Abstract

A 32 GHz filter constructed of micromachined cavities in silicon is presented. The filter structure consists of two side-by-side, horizontally-oriented cavities, which are coupled by evanescent waveguide sections, and are fed by microstrip lines through slot apertures. The measured results are presented and compared to those predicted by an FEM model. The simulated filter response has a bandwidth of 2.3% centered at 31.74 GHz with an insertion loss of 1.2 dB. The measured performance indicates a 2.2% bandwidth centered at 31.70 GHz with a de-embedded insertion loss of 1.2 dB, and an unloaded Q of 1422.

Keywords

Chebyshev filters; band-pass filters; cavity resonator filters; finite element analysis; micromachining; microstrip lines; microstrip transitions; microwave filters; millimetre wave filters; slot lines; waveguide couplers; 1.2 dB; 31.70 GHz; 31.74 GHz; 32 GHz; 32 GHz filter; FEM; coupled evanescent waveguide; de-embedded insertion loss; horizontally integrated micromachined filter; horizontally-oriented cavities; micromachined silicon cavities; microstrip line; slot apertures; Bandwidth; Cavity resonators; Chebyshev approximation; Insertion loss; Microwave filters; Packaging; Performance loss; Resonator filters; Silicon; Virtual prototyping;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2004 IEEE MTT-S International

ISSN

0149-645X

Print_ISBN

0-7803-8331-1

Type

conf

DOI

10.1109/MWSYM.2004.1336003

Filename

1336003