DocumentCode
420172
Title
RF MEMS waveguide switch
Author
Daneshmand, M. ; Mansour, R.R. ; Sarkar, N.
Author_Institution
Waterloo Univ., Ont., Canada
Volume
2
fYear
2004
fDate
6-11 June 2004
Firstpage
589
Abstract
In this paper, a unique concept for RF MEMS waveguide switches is introduced. The proposed structure employs a ridge waveguide integrated with MEMS actuators. The switch combines the advantages of MEMS technology with the high power handling capability of waveguide technology. It also promises to be useful in high frequency applications 100-200 GHz. In order to demonstrate the concept, a Ku-band waveguide switch employing a thermally plastic deformable MEMS actuators has been fabricated and tested. The achievable measured results are very encouraging, demonstrating the potential of such novel type of MEMS switches.
Keywords
microactuators; microswitches; plastic deformation; ridge waveguides; 100 to 200 GHz; Ku-band waveguide switch; MEMS technology; RF MEMS waveguide switch; ridge waveguide integration; thermally plastic deformable MEMS actuators; waveguide technology; Actuators; Contacts; Current density; Gold; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Waveguide components; Waveguide transitions;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2004 IEEE MTT-S International
ISSN
0149-645X
Print_ISBN
0-7803-8331-1
Type
conf
DOI
10.1109/MWSYM.2004.1336050
Filename
1336050
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