Title :
A reconfigurable 6-20 GHz RF MEMS impedance tuner
Author :
Vähä-Heikkilä, T. ; Varis, J. ; Tuovinen, J. ; Rebeiz, G.M.
Author_Institution :
Michigan Univ., USA
Abstract :
A 6-20 GHz reconfigurable triple-stub impedance tuner has been developed. It is based on a 11-switched MEMS capacitor network producing 211 different impedances. The measured and simulated impedance coverage is the widest ever measured to-date from any RF MEMS tuner. This network is most suitable for noise parameters and load-pull measurements of transistors at 6-20 GHz.
Keywords :
impedance matching; microswitches; switched capacitor networks; transistors; 6 to 20 GHz; MEMS; RF; SiO2; capacitor network; glass substrate; impedance matching; load-pull measurements; microelectromechanical system; noise parameters; radiofrequency; transistors; triple-stub impedance tuner; Capacitance; Capacitors; Impedance measurement; Micromechanical devices; Microwave transistors; Network topology; Noise measurement; Radiofrequency microelectromechanical systems; Switches; Tuners;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1339062
