Title :
A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50 GHz thin film filters
Author :
Pan, J.J. ; Jiang, Joy ; Zhou, Feug Qing ; Guo, James
Author_Institution :
Lightwaves2020 Inc., Milpitas, CA, USA
Abstract :
Internal stress simulation of a multilayer structure using measured wafer curvature accurately predicts the central wavelength shifts and spectrum ripple resulting from grinding and temperature change, thereby greatly improving the production yield of 50 GHz filters.
Keywords :
coating techniques; composite materials; internal stresses; optical fibre filters; optical multilayers; piezo-optical effects; spectral line shift; stress analysis; thermo-optical effects; thin films; 50 GHz; coating process control; internal mechanical stress analysis; internal stress simulation; multilayer composite; optimized control; spectrum ripple; thin film filters; wafer curvature; wavelength shifts;
Conference_Titel :
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location :
Los Angeles, CA, USA
Print_ISBN :
1-55752-772-5
