DocumentCode
421106
Title
A complete internal mechanical stress analysis of multilayer composite leads to optimized coating process control for 50 GHz thin film filters
Author
Pan, J.J. ; Jiang, Joy ; Zhou, Feug Qing ; Guo, James
Author_Institution
Lightwaves2020 Inc., Milpitas, CA, USA
Volume
1
fYear
2004
fDate
23-27 Feb. 2004
Firstpage
89
Abstract
Internal stress simulation of a multilayer structure using measured wafer curvature accurately predicts the central wavelength shifts and spectrum ripple resulting from grinding and temperature change, thereby greatly improving the production yield of 50 GHz filters.
Keywords
coating techniques; composite materials; internal stresses; optical fibre filters; optical multilayers; piezo-optical effects; spectral line shift; stress analysis; thermo-optical effects; thin films; 50 GHz; coating process control; internal mechanical stress analysis; internal stress simulation; multilayer composite; optimized control; spectrum ripple; thin film filters; wafer curvature; wavelength shifts;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location
Los Angeles, CA, USA
Print_ISBN
1-55752-772-5
Type
conf
Filename
1359194
Link To Document