Title :
Interference-based optical MEMS filters
Author :
Solgaard, Olav ; Belikov, Ruslan ; Yu, Kyoungsik
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA, USA
Abstract :
In this paper we describe tunable interference filters based on arrays of MEMS micromirrors. A simple analytical description of the height distribution of micromirrors needed to create a desired spectral response is presented, and the implications on the design and utility of MEMS interference filters are discussed. Finally we describe two practical filter implementations. The first enables continuous spectral control over relatively broad bands, and the second is designed for wavelength-division-multiplexed fiber optic communication systems.
Keywords :
diffractive optical elements; interference filters; micromechanical devices; micromirrors; optical arrays; optical communication equipment; optical design techniques; optical fibre communication; optical tuning; wavelength division multiplexing; MEMS micromirror arrays; continuous spectral control; diffractive optical filters; fiber optic communication systems; optical MEMS filters; tunable interference filters; wavelength-division-multiplexed systems;
Conference_Titel :
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location :
Los Angeles, CA, USA
Print_ISBN :
1-55752-772-5