DocumentCode
421149
Title
Interference-based optical MEMS filters
Author
Solgaard, Olav ; Belikov, Ruslan ; Yu, Kyoungsik
Author_Institution
Dept. of Electr. Eng., Stanford Univ., CA, USA
Volume
1
fYear
2004
fDate
23-27 Feb. 2004
Firstpage
373
Abstract
In this paper we describe tunable interference filters based on arrays of MEMS micromirrors. A simple analytical description of the height distribution of micromirrors needed to create a desired spectral response is presented, and the implications on the design and utility of MEMS interference filters are discussed. Finally we describe two practical filter implementations. The first enables continuous spectral control over relatively broad bands, and the second is designed for wavelength-division-multiplexed fiber optic communication systems.
Keywords
diffractive optical elements; interference filters; micromechanical devices; micromirrors; optical arrays; optical communication equipment; optical design techniques; optical fibre communication; optical tuning; wavelength division multiplexing; MEMS micromirror arrays; continuous spectral control; diffractive optical filters; fiber optic communication systems; optical MEMS filters; tunable interference filters; wavelength-division-multiplexed systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location
Los Angeles, CA, USA
Print_ISBN
1-55752-772-5
Type
conf
Filename
1359289
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