DocumentCode
421178
Title
Fabrication and analysis of add-drop filters based on microring resonators in SiN
Author
Barwicz, Tymon ; Popovic, Milos A. ; Rakich, Peter T. ; Watts, Michael R. ; Haus, Hermann A. ; Ippen, Erich P. ; Smith, Henry I.
Author_Institution
Res. Lab. of Electron., MIT, Cambridge, MA, USA
Volume
1
fYear
2004
fDate
23-27 Feb. 2004
Firstpage
509
Abstract
Add-drop filters based on microring resonators were fabricated in silicon-rich silicon nitride. Third-order microring filters showed an 80 GHz bandwidth, a 4 dB loss from input to drop, and a 24 nm free spectral-range.
Keywords
integrated optics; micro-optics; optical communication equipment; optical fabrication; optical filters; optical losses; optical resonators; silicon compounds; 4 dB; 80 GHz; SiN; add-drop filters; free spectral-range; microring resonators; silicon-rich silicon nitride; third-order microring filters;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location
Los Angeles, CA, USA
Print_ISBN
1-55752-772-5
Type
conf
Filename
1359559
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