• DocumentCode
    421199
  • Title

    Small-footprint thermocapillary optical switch with a heater array on a CMOS IC chip

  • Author

    Sato, Makoto ; Makihara, Mitsubiro ; Shimokawa, Fusao ; Matsui, Shinsuke

  • Author_Institution
    NTT Microsystem Integration Lab., Kanagawa, Japan
  • Volume
    1
  • fYear
    2004
  • fDate
    23-27 Feb. 2004
  • Firstpage
    612
  • Abstract
    We propose a hybrid structure combining a planar lightwave circuit chip and CMOS IC chip to achieve a compact switch fabric and demonstrate a new 16/spl times/16-size matrix thermocapillary optical switch fabricated based on this concept.
  • Keywords
    CMOS integrated circuits; arrays; micro-optics; micromechanical devices; optical planar waveguides; optical switches; thermo-optical devices; CMOS IC chip; heater array; planar lightwave circuit chip; small-footprint thermocapillary optical switch;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference, 2004. OFC 2004
  • Conference_Location
    Los Angeles, CA, USA
  • Print_ISBN
    1-55752-772-5
  • Type

    conf

  • Filename
    1359594
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=421199