DocumentCode
421490
Title
Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices
Author
Yamashita, Masatsugu ; Kiwa, Toshihiko ; Tonouchi, Masayoshi ; Kawase, Kodo
Author_Institution
RIKEN, Wako, Japan
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.
Keywords
electrical faults; image resolution; inspection; microprocessor chips; optical microscopy; semiconductor device testing; submillimetre wave imaging; THz emission image; electrical faults inspection; integrated circuits; laser-terahertz emission microscope; microprocessor chip; semiconductor devices; spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360682
Link To Document