DocumentCode
421537
Title
Direct F/sub 2/ laser fabrication of Y-junction waveguides in flame hydrolysis deposited germanium-doped silica
Author
Ho, Stephen ; Aitchison, Stewart ; Garcia-Blanco, Sonia ; Herman, Peter R. ; Cleary, Alison
Author_Institution
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
Planar waveguides and Y-junctions designed for single mode operation at 632.8 nm were fabricated in flame hydrolysis deposition (FHD) germanium-doped silica through contact-mask exposure with 157-nm F/sub 2/ laser nanosecond-pulse irradiation.
Keywords
fluorine; gas lasers; germanium; laser beam effects; laser materials processing; optical fabrication; optical planar waveguides; 157 nm; 632.8 nm; F/sub 2/; F/sub 2/ laser; SiO/sub 2/:Ge; Y-junction waveguides; contact-mask exposure; direct laser fabrication; flame hydrolysis deposition; germanium-doped silica; nanosecond-pulse irradiation; planar waveguides; single mode operation;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360729
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