Arbitrary wave profile generation of a laser using a digital micromirror device

Author

Park, Jung-Rae ; Donaldson, W.R. ; Sobolewski, Roman ; Kearney, K.

Author_Institution

Lab. for Laser Energetics, Rochester Univ., NY, USA

Volume

2

fYear

2004

fDate

16-21 May 2004

Abstract

A digital micromirror device (DMD) is a microelectromechanical structure (MEMS) device with many micromirrors on the top surface; it is used as a spatial light modulator for many applications, including lithography, projection, telecommunications, and lasers. We determined the limiting resolution of a DMD by measuring the modulation transfer function (MTF) of a DMD and intersecting with the aerial image modulation (AIM) at 351 -nm wavelength. The limiting resolution was 14.61 cycles/mm. We generated the laser-beam profile by changing the pattern of micromirrors in the DMD. The input beam from center peaked profile transformed into a flattop super-Gaussian profile with order 6.

Keywords

image resolution; laser beams; micromechanical devices; micromirrors; optical transfer function; spatial light modulators; 351 nm; MEMS device; aerial image modulation; arbitrary wave profile generation; center peaked profile; digital micromirror device; flattop super-Gaussian profile; laser; laser-beam profile; limiting resolution; lithography; microelectromechanical structure; modulation transfer function; projection; spatial light modulator; telecommunications;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2004. (CLEO). Conference on

Conference_Location

San Francisco, CA

Print_ISBN

1-55752-777-6

Type

conf

Filename

1360733