Title :
Direct laser fabrication of blazed diffraction gratings on polymer films
Author :
Hutchinson, G. ; Leng, Y. ; Yun, V. ; Du, M. ; Lucas, L. ; Lee, C.H. ; Herman, W.N. ; Goldhar, J.
Author_Institution :
Lab. for Phys. Sci., Maryland Univ., College Park, MD, USA
Abstract :
Interference between 20 ns 193 nm ArF laser beams is used for the fabrication of blazed gratings on Cyclotene (BCB, Dow) polymer films. The grating shape is tuned for almost complete power diffraction into the 1/sup st/ order.
Keywords :
diffraction gratings; integrated optics; laser materials processing; light interference; optical fabrication; optical films; optical polymers; 193 nm; 20 ns; Cyclotene polymer films; blazed diffraction gratings; direct laser fabrication; grating shape; interference; polymer films;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
