DocumentCode
421626
Title
Direct laser fabrication of blazed diffraction gratings on polymer films
Author
Hutchinson, G. ; Leng, Y. ; Yun, V. ; Du, M. ; Lucas, L. ; Lee, C.H. ; Herman, W.N. ; Goldhar, J.
Author_Institution
Lab. for Phys. Sci., Maryland Univ., College Park, MD, USA
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
Interference between 20 ns 193 nm ArF laser beams is used for the fabrication of blazed gratings on Cyclotene (BCB, Dow) polymer films. The grating shape is tuned for almost complete power diffraction into the 1/sup st/ order.
Keywords
diffraction gratings; integrated optics; laser materials processing; light interference; optical fabrication; optical films; optical polymers; 193 nm; 20 ns; Cyclotene polymer films; blazed diffraction gratings; direct laser fabrication; grating shape; interference; polymer films;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360821
Link To Document