DocumentCode
421642
Title
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
Author
Moktadir, Z. ; Prakash, G.V. ; Koukharenko, E. ; Gollasch, C. ; Bagnall, D.M. ; Kraft, M. ; Hinds, E. ; Baumberg, J.J.
Author_Institution
Sch. of Electron. & Comput. Sci., Southampton Univ., UK
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
Keywords
antireflection coatings; etching; gold; micromirrors; optical fabrication; silicon; KOH; Si; anisotropic etching; gold coating; micromirrors; silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360838
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