Title :
Growth of diamond-like films at room temperature on Si and III-V materials
Author :
Bugge, Renato ; Fimland, Bjørn Ove
Author_Institution :
Dept. of Phys. Electron., Norwegian Univ. of Sci. & Technol., Trondheim, Norway
Abstract :
A new method to grow diamond-like films was used on Si and in III-V optoelectronic components. Room temperature deposition of amorphous-like films with refractive index of 2.24 was done on and around AlGaAsSb waveguides.
Keywords :
amorphous state; integrated optics; optical films; refractive index; thin films; 20 degC; AlGaAsSb; AlGaAsSb waveguides; GaAs; GaSb; Si; amorphous-like films; diamond-like films growth; refractive index; room temperature deposition;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
