• DocumentCode
    421645
  • Title

    Growth of diamond-like films at room temperature on Si and III-V materials

  • Author

    Bugge, Renato ; Fimland, Bjørn Ove

  • Author_Institution
    Dept. of Phys. Electron., Norwegian Univ. of Sci. & Technol., Trondheim, Norway
  • Volume
    2
  • fYear
    2004
  • fDate
    16-21 May 2004
  • Abstract
    A new method to grow diamond-like films was used on Si and in III-V optoelectronic components. Room temperature deposition of amorphous-like films with refractive index of 2.24 was done on and around AlGaAsSb waveguides.
  • Keywords
    amorphous state; integrated optics; optical films; refractive index; thin films; 20 degC; AlGaAsSb; AlGaAsSb waveguides; GaAs; GaSb; Si; amorphous-like films; diamond-like films growth; refractive index; room temperature deposition;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2004. (CLEO). Conference on
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    1-55752-777-6
  • Type

    conf

  • Filename
    1360841
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=421645