Title :
Optical instrumentation for elastic light scattering monitoring of surface and bulk properties
Author :
Sterligov, V.A. ; Cheyssac, P. ; Bossis, G. ; Metayer, C.
Author_Institution :
Laboratoire de Physique de la Matiere Condensee, Nice Univ., France
Abstract :
A new and powerful method for characterization and monitoring of surface and bulk properties has been developed. This method is based on fast, sensitive and accurate measurements of the half-sphere´s angular distribution of scattered light.
Keywords :
light scattering; monitoring; rough surfaces; surface topography measurement; angular distribution; elastic light scattering monitoring;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
