Title :
Nano-patterning of PMMA using a /spl lambda/ = 46.9 nm table-top laser
Author :
Capeluto, M.G. ; Marconi, M.C. ; Ludena, S. ; Pietrasanta, C. ; Grisham, M. ; Reagan, B. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution :
Departamento de Fisica, Buenos Aires Univ., Argentina
Abstract :
The recording in PMMA of nanometer-size features from a Fresnel diffraction pattern utilising a very compact 46.9 nm capillary discharge laser is discussed.
Keywords :
Fresnel diffraction; gas lasers; laser materials processing; laser transitions; nanopatterning; polymers; ultraviolet sources; 46.9 nm; Fresnel diffraction pattern; PMMA; capillary discharge laser; nanopatterning; table-top laser;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6