Title :
Exploring the deterministic nature of femtosecond laser-induced optical breakdown and applications to nanomachining
Author :
Hunt, Alan J. ; Joglekar, Ajit ; Meyhöfer, Edgar ; Liu, Hsiao-Hua ; Mourou, Gerard
Author_Institution :
Dept. of Biomed. Eng., Michigan Univ., Ann Arbor, MI, USA
Abstract :
The limits of nanoscale machining with sub-picosecond pulsed lasers are systematically characterized. We propose that the minimum scale is ultimately limited by the valence electron density, thus enabling highly reproducible machining at the nanometer scale.
Keywords :
high-speed optical techniques; laser beam effects; laser beam machining; micromachining; nanotechnology; deterministic nature; femtosecond laser; laser-induced optical breakdown; nanomachining; subpicosecond pulsed lasers; valence electron density;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
