DocumentCode
421897
Title
Exploring the deterministic nature of femtosecond laser-induced optical breakdown and applications to nanomachining
Author
Hunt, Alan J. ; Joglekar, Ajit ; Meyhöfer, Edgar ; Liu, Hsiao-Hua ; Mourou, Gerard
Author_Institution
Dept. of Biomed. Eng., Michigan Univ., Ann Arbor, MI, USA
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
The limits of nanoscale machining with sub-picosecond pulsed lasers are systematically characterized. We propose that the minimum scale is ultimately limited by the valence electron density, thus enabling highly reproducible machining at the nanometer scale.
Keywords
high-speed optical techniques; laser beam effects; laser beam machining; micromachining; nanotechnology; deterministic nature; femtosecond laser; laser-induced optical breakdown; nanomachining; subpicosecond pulsed lasers; valence electron density;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361349
Link To Document