• DocumentCode
    422050
  • Title

    Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses

  • Author

    Crawford, T.H.R. ; Borowiec, A. ; Haugen, H.K.

  • Author_Institution
    Dept. of Eng. Phys., McMaster Univ., Hamilton, Ont., Canada
  • Volume
    1
  • fYear
    2004
  • fDate
    16-21 May 2004
  • Abstract
    We present surface structures formed on silicon after irradiation by large numbers of low-fluence femtosecond laser pulses with wavelengths in the transparency regime of silicon. These structures have periods significantly less than the laser wavelength.
  • Keywords
    elemental semiconductors; high-speed optical techniques; laser beam effects; silicon; surface structure; transparency; Si; femtosecond laser pulses; laser wavelength; silicon; subwavelength surface structures; transparency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2004. (CLEO). Conference on
  • Conference_Location
    San Francisco, CA
  • Print_ISBN
    1-55752-777-6
  • Type

    conf

  • Filename
    1361515
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=422050