Title :
Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses
Author :
Crawford, T.H.R. ; Borowiec, A. ; Haugen, H.K.
Author_Institution :
Dept. of Eng. Phys., McMaster Univ., Hamilton, Ont., Canada
Abstract :
We present surface structures formed on silicon after irradiation by large numbers of low-fluence femtosecond laser pulses with wavelengths in the transparency regime of silicon. These structures have periods significantly less than the laser wavelength.
Keywords :
elemental semiconductors; high-speed optical techniques; laser beam effects; silicon; surface structure; transparency; Si; femtosecond laser pulses; laser wavelength; silicon; subwavelength surface structures; transparency;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
