Title :
Measurement of angular deviation in ultra-linear mirror actuators for scanning high finesse resonators
Author :
Fidric, Bernard ; Kachanov, Alexander ; Tan, Sze ; Crosson, Eric ; Paldus, Barbara
Author_Institution :
Picarro Inc., Sunnyvale, CA, USA
Abstract :
We describe a new method for measuring angular deviations of linear actuators as small as 0.1 /spl mu/rad//spl mu/m. Two designs of ultra-linear actuators for cavity ring-down spectroscopy are characterized and compared by achievable sensitivity.
Keywords :
Fabry-Perot resonators; attitude measurement; electric actuators; mirrors; optical design techniques; cavity ring-down spectroscopy; scanning high finesse resonators; ultralinear mirror actuators;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
