DocumentCode
422132
Title
Surface profilometry at large working distances using volume holographic optics
Author
Sinha, Arnab ; Sun, Wenyang ; Barbastathis, George
Author_Institution
Dept. of Mech. Eng., MIT, Cambridge, MA, USA
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
We present a volume holographic long range surface profilometer that exploits a priori object information to resolve up to 50 /spl mu/m surface height features at a working distance of 50 cm.
Keywords
holography; optical information processing; surface topography measurement; 50 cm; surface profilometry; volume holographic optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361599
Link To Document