DocumentCode
422134
Title
Interferometric characterization of transmission diffraction gratings with non-flat substrate surfaces
Author
Sumetsky, M. ; White, T. ; Dyson, I.M. ; Westbrook, P.S. ; Eggleton, B.J.
Author_Institution
OFD Lab., Murray Hill, NJ, USA
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
We demonstrate a side-diffraction interferometric method for characterization of transmission diffraction gratings enabling simultaneous measurement of the local chirp and substrate thickness variation.
Keywords
diffraction gratings; light interferometry; surface topography measurement; nonflat substrate surfaces; side-diffraction interferometric method; transmission diffraction gratings;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361601
Link To Document