DocumentCode
422173
Title
Towards silicon-compatible 2D and 3D photonic crystals
Author
Ferrand, P. ; Jonsson, F. ; Seekamp, J. ; Soloviev, V. ; Romanov, S.G. ; Torres, C. M Sotomayor ; Ahopelto, J. ; Egen, M. ; Zentel, R.
Author_Institution
Inst. of Mater. Sci., Wuppertal Univ., Germany
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
The realisation of photonic crystals on silicon platforms is presented with the aim to obtain waveguides and light emitting structures. We report on crystallisation on patterned substrates and defect engineering by direct electron-beam writing as examples of two approaches to fabricate and structure photonic crystals. The requirements to realise waveguides need crystallisation in confined environments.
Keywords
crystallisation; electron beam lithography; light emitting devices; optical fabrication; optical waveguides; photonic crystals; Si; crystallisation; direct electron-beam writing; light emitting structures; silicon-compatible photonic crystals; waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361641
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