Modeling, identification, and control of micro-sensor prototypes

Microelectromechanical systems (MEMS) are stimulating the move of modern digital control "on-chip" for a growing number of sophisticated applications. One such application is microinertial sensors of ever increasing capability bringing inertial awareness to virtually anything that moves. Modeling, identification and control of this particular genre of MEMS developed through a Boeing and UCLA collaboration is presented as an illustration on the rising edge of this revolutionary transition in the realization and theory of modern control systems.