DocumentCode
424603
Title
Feedback control for a MEMS-based high-performance operational amplifier
Author
Paik, Song-Hee ; Aina, Akin ; Denison, Tim ; Lundberg, Kent
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA
Volume
1
fYear
2004
fDate
June 30 2004-July 2 2004
Firstpage
380
Abstract
A novel MEMS-based operational amplifier that uses extensive feedback control techniques to achieve robust performance is described. The input stage of the amplifier is a MEMS structure that provides a variable capacitance to transduce a low-frequency input voltage into a high-frequency AC current. This up-modulation of the input signal is exploited to reduce offsets and low-frequency noise, and the dielectric isolation of the MEMS structure provides high input impedance and low leakage currents. This paper details the closed-loop designs used to implement the signal up-modulation and to provide accurate gain to the input.
Keywords
closed loop systems; control system synthesis; feedback; micromechanical devices; operational amplifiers; MEMS-based high-performance operational amplifier; closed-loop designs; feedback control; input signal up-modulation;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2004. Proceedings of the 2004
Conference_Location
Boston, MA, USA
ISSN
0743-1619
Print_ISBN
0-7803-8335-4
Type
conf
Filename
1383634
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