Position feedback for microrobots based on scanning probe microscopy

Author

Bergander, A. ; Driesen, W. ; Lal, A. ; Varidel, T. ; Meizoso, M. ; Bleuler, H. ; Breguet, I.M.

Author_Institution

Ecole Polytech. Fed. de Lausanne, Switzerland

Volume

2

fYear

2004

fDate

28 Sept.-2 Oct. 2004

Firstpage

1734

Abstract

A cluster of small cooperative robots capable of executing measurement and manipulation tasks is being developed within the scope of a European project. The robots are autonomous and have an overall dimension in the order of 1 cm³. In this paper we present the concept of the robots, along with possible locomotion modules based on piezoelectric stick-slip actuators. Tools can be added to the robot for different measurements and manipulations. The integration of an AFM probe on the robot has been realized as a high resolution sensor for localization purposes and for measurements. First experimental results are shown.

Keywords

image sensors; micromanipulators; multi-robot systems; scanning probe microscopy; AFM probe; autonomous robot; high resolution sensor; locomotion module; manipulation task; measurement task; microrobot; piezoelectric stick-slip actuator; position feedback; scanning probe microscopy; small cooperative robot; Collaborative work; Feedback; Intelligent actuators; Intelligent robots; Intelligent sensors; Piezoelectric actuators; Power supplies; Robot sensing systems; Scanning probe microscopy; Transmitters;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems, 2004. (IROS 2004). Proceedings. 2004 IEEE/RSJ International Conference on

Print_ISBN

0-7803-8463-6

Type

conf

DOI

10.1109/IROS.2004.1389646

Filename

1389646