DocumentCode
426393
Title
Microwave plasmochemical deposition of the planar waveguide structures on the base of silica glass
Author
Grigorjantz, V.V. ; Kochmarev, L.Yu. ; Shilov, P.I.
Author_Institution
Inst. of Radioengineering & Electron., Russian Acad. of Sci., Frjasino, Russia
fYear
2004
fDate
13-17 Sept. 2004
Firstpage
543
Lastpage
544
Abstract
Planar optical waveguides (POW) on silicon and silica substrates have applications for integrated sensors, optical communications and MOEMS-technologies. Quartz-quartz planar waveguides with fluorine cladding and pure silica glass core were produced by the microwave plasmochemical deposition method at low pressure.
Keywords
fluorine compounds; glass; optical planar waveguides; plasma deposition; quartz; fluorine cladding; low pressure deposition method; microwave plasmochemical deposition; planar optical waveguides; pure silica glass core; quartz-quartz planar waveguides; silica substrates; silicon; Electromagnetic heating; Glass; Optical planar waveguides; Optical refraction; Optical resonators; Optical sensors; Optical variables control; Optical waveguides; Planar waveguides; Silicon compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology, 2004. CriMico 2004. 2004 14th International Crimean Conference on
Print_ISBN
966-7968-69-3
Type
conf
DOI
10.1109/CRMICO.2004.183326
Filename
1390308
Link To Document