Peculiarities of microwave plasma forming conditions at low vacuum in plasmatron with rectangular form resonator

The results are presented of measuring a series of electrophysical characteristics determining the operation of a microwave plasma generator based on a rectangular resonator with partial filling of the resonating volume with plasma. It was established that the allocation of a microwave field and local electrical plasma, with conductivity according to the length of the discharge area, carries a periodic character with alternating maxima and minima. The changes of temperature values have a rather smooth shape with a small rise near the place of microwave energy input to the resonator. Because of a space inhomogeneity in the parameters of the microwave discharge, plasma generators of a given type at microwave power density values of up to 7.104 W/m³ brought to the discharge are reasonable to use for non-precision plasma processes such as interoperating processes for activation of the substrate surfaces of integrated circuits, cleaning off lacquers and polish, plasma-chemical removal of photoresistant film coats, etc.