Title :
A high-performance dipole surface drive for large travel and force
Author :
Hoen, S. ; Bai, Q. ; Harley, J.A. ; Horsley, D.A. ; Matta, F. ; Verhoeven, T. ; Williams, J. ; Williams, K.R.
Author_Institution :
Agilent Lab., Palo Alto, CA, USA
Abstract :
We report unparalleled travel, force, precision and repeatability with an electrostatically actuated dipole surface drive. We have successfully demonstrated motors that generate several hundred micronewtons while traveling 50 microns at 60 V. Without external feedback control, the motors can be positioned with nanometer resolution and repeatability. The manufacture of these motors uses a two-level polysilicon deposition, a wafer bond and two anisotropic deep silicon etches.
Keywords :
electrostatic actuators; elemental semiconductors; etching; motor drives; semiconductor device models; silicon; stepping motors; wafer bonding; 50 V; 50 micron; Si; dipole surface drive; electrostatically actuated dipole surface; nanometer resolution; stepping motors; two anisotropic deep silicon etches; two-level polysilicon deposition; wafer bond; Actuators; Electrodes; Electrostatics; Manufacturing; Micromotors; Mirrors; Optical microscopy; Probes; Stators; Voltage;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1395506
