Title :
Modulation of quantum-electronic devices by bending of special MEMS structures
Author :
Hartnagel, Hans Ludwig ; Dragoman, Mircea
Author_Institution :
Inst. fuer Hochfrequenztechnik, Technische Univ. Darmstadt, Germany
Abstract :
Micromechanical structures can be employed to modulate the performance of quantum-electronic devices. The available possibilities are reviewed and the resulting device behaviour is estimated. In particular one- and zero-DEG concepts are evaluated first. Then, resonant tunnelling and quantum cascading are discussed. The applications concern microwave and optical concepts. Finally, quantum structures for field emission of electrons are reviewed.
Keywords :
bending; electron field emission; micromechanical devices; optical modulation; quantum optics; resonant tunnelling; semiconductor quantum dots; 1D electron gases; 2D electron gases; MEMS; electron field emission; microelectromechanical devices; modulation; quantum cascading; quantum-electronic devices; resonant tunnelling; Analog-digital conversion; Electrons; Micromechanical devices; Optical modulation; Optical waveguides; Quantum computing; Semiconductivity; Shape; Switches; Voltage;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1402794
