DocumentCode
428934
Title
MEMS switches: design and manufacturing
Author
Vasilache, D. ; Tibeica, C. ; Moagar, V. ; Enachescu, R. ; Iordache, T. ; Vladoianu, F. ; Podaru, C. ; Manea, E. ; Muller, A.
Author_Institution
National Inst. for R&D in Microtechnologies, Bucharest, Romania
Volume
1
fYear
2004
fDate
4-6 Oct. 2004
Lastpage
172
Abstract
The aim of this paper is to present first MEMS switch structures designed and manufactured in IMT. Switch structures with different length were designed, manufactured and measured. Comparisons between simulated and measured results are also presented.
Keywords
microswitches; IMT; MEMS switches; switch structures; Biomembranes; Bridge circuits; Electrodes; Gold; Manufacturing; Microswitches; Resists; Switches; Transmission line measurements; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN
0-7803-8499-7
Type
conf
DOI
10.1109/SMICND.2004.1402831
Filename
1402831
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