Title :
Microstrip transducer optimisation for band pass micropackaged magnetostatic wave resonators
Author :
Cismaru, Alina ; Sajin, George ; Craciunoiu, F. ; Marcelli, Romolo
Author_Institution :
National R&D Inst. for Microtechnologies, Bucharest, Romania
Abstract :
In this paper the design of microstrip line configurations to be used for band pass magneto static wave resonators on silicon microprocessed substrates has been studied. Two configurations have been simulated: (i) grounded microstrip lines and (ii) loaded ones by 50 Ω resistors. Microprocessing of the substrate is proposed to improve the micropackaging of the resonator and its electrical matching with the transducers. Further to the improvement expected from the microprocessing allows a better isolation for broadband applications.
Keywords :
electronics packaging; magnetostatic wave devices; micromechanical resonators; microstrip lines; microstrip resonators; 50 ohms; band pass magnetostatic wave resonator; band pass magnetostatic wave resonators; broadband applications; electrical matching; grounded microstrip lines; micropackaged magnetostatic wave resonators; microstrip line configurations; microstrip transducer optimisation; silicon microprocessed substrates; Circuit simulation; Couplings; Design optimization; Etching; Magnetic separation; Magnetostatic waves; Microstrip resonators; Microwave devices; Silicon; Transducers;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1402832
