Microstrip transducer optimisation for band pass micropackaged magnetostatic wave resonators

Author

Cismaru, Alina ; Sajin, George ; Craciunoiu, F. ; Marcelli, Romolo

Author_Institution

National R&D Inst. for Microtechnologies, Bucharest, Romania

Volume

1

fYear

2004

fDate

4-6 Oct. 2004

Lastpage

176

Abstract

In this paper the design of microstrip line configurations to be used for band pass magneto static wave resonators on silicon microprocessed substrates has been studied. Two configurations have been simulated: (i) grounded microstrip lines and (ii) loaded ones by 50 Ω resistors. Microprocessing of the substrate is proposed to improve the micropackaging of the resonator and its electrical matching with the transducers. Further to the improvement expected from the microprocessing allows a better isolation for broadband applications.

Keywords

electronics packaging; magnetostatic wave devices; micromechanical resonators; microstrip lines; microstrip resonators; 50 ohms; band pass magnetostatic wave resonator; band pass magnetostatic wave resonators; broadband applications; electrical matching; grounded microstrip lines; micropackaged magnetostatic wave resonators; microstrip line configurations; microstrip transducer optimisation; silicon microprocessed substrates; Circuit simulation; Couplings; Design optimization; Etching; Magnetic separation; Magnetostatic waves; Microstrip resonators; Microwave devices; Silicon; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International

Print_ISBN

0-7803-8499-7

Type

conf

DOI

10.1109/SMICND.2004.1402832

Filename

1402832