Title :
Optimized methods for piezoelectric powders synthesis in microsensors applications
Author :
Ciuciumis, A. ; Folea, A. ; Cernica, I.
Author_Institution :
National Inst. for R&D in Microtehnologies, Bucharest, Romania
Abstract :
This paper presents the effect of heating rate on the sintering behavior and the influence amounts of dopants on the stabilization powders. Different types of powders (doped with La2O3) were sintered at 1100°C for 2h with a wide range of heating rate. Investigations of phase compositions, densification and microstructure were performed.
Keywords :
densification; heating; lanthanum compounds; microsensors; piezoceramics; powder technology; sintering; 1100 C; La2O3; densification; dopants; heating rate; microsensors; microstructure; phase compositions; piezoelectric powders synthesis; sintering behavior; stabilization powders; Bioceramics; Ceramics; Chemicals; Heating; Microsensors; Microstructure; Optimization methods; Powders; Temperature; X-ray scattering;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1402859