Title :
A low-voltage and low-power RF MEMS switch actuated by combination of electromagnetic and electrostatic forces
Author :
Il-Joo Cho ; Tacksang Song ; Sang-Hyun Baek ; Euisik Yoon
Abstract :
This paper reports on a new RF MEMS switch actuated by the combination of electromagnetic and electrostatic forces for low voltage and low power operation. The proposed RF MEMS switch has utilized the proper combination of two actuation mechanisms: taking advantage of the large actuation force from electromagnetic actuation for initial movement and the low power feature from electrostatic actuation for holding the actuator position. From the fabricated switch, feasibility of operation has been successfully demonstrated with an actuation current of 53111.4 and a required holding voltage of 3.7V. The power consumption is measured as 40.3N per switching. We have achieved isolation of -34dB and insertion loss of - 0.37dB at ZOGHZ from the initial device, respectively.
Keywords :
Coils; Communication switching; Electrodes; Electromagnetic forces; Electrostatic actuators; Energy consumption; Low voltage; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0