• DocumentCode
    43056
  • Title

    Pulsed Hertzian dipole radiation and electrostatic discharge events in manufacturing

  • Author

    Maloney, Timothy J.

  • Author_Institution
    Intel Corp., Santa Clara, CA, USA
  • Volume
    2
  • Issue
    3
  • fYear
    2013
  • fDate
    3rd Quarter 2013
  • Firstpage
    37
  • Lastpage
    46
  • Abstract
    A destructive Charged Device Model electrostatic discharge event can happen in semiconductor manufacturing and should be detectable from radiation that results from collapse of an electric dipole. The analytically describable radiation field pulse of CDM can be readily produced with a new instrument that creates dipole collapse at will. A coaxial monopole E-field antenna\´s transfer function gives the antenna signal in near-field, and experiments compare well with theory. A major feature of the antenna response to this field pulse is a bipolar "monocycle" pulse. A transmission linebased synthetic monocycle pulser, for characterizing antenna-driven ESD detectors, can be built and is described.
  • Keywords
    electrostatic discharge; monopole antennas; semiconductor industry; transfer functions; CDM; antenna signal; antenna-driven ESD detector; bipolar monocycle pulse; coaxial monopole E-field antenna transfer function; electric dipole; electrostatic discharge event; pulsed Hertzian dipole radiation; radiation field pulse; semiconductor manufacturing; transmission linebased synthetic monocycle pulser; Antenna measurements; Current measurement; Detectors; Dipole antennas; Discharges (electric); Electrostatic discharges; Manufacturing processes;
  • fLanguage
    English
  • Journal_Title
    Electromagnetic Compatibility Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    2162-2264
  • Type

    jour

  • DOI
    10.1109/MEMC.2013.6623294
  • Filename
    6623294