Title :
A thermally driven tunable TFBAR bandpass filter
Author :
Hong-Teuk Kim ; Heon-Min Lee ; Hyung-Kyu Choi ; Jae-Young Park ; Jong-Uk Bu ; Kyungho Lee
Abstract :
A tunable handpass filter based on TFBARs bas been realized by micro-machined thin film AIN devices. For tuning the center frequency, a MO micro heating Line is integrated with TFBARs. As applying the de voltage from 0 to 11.6 V to the resistive heating Line, the center frequency of a PCS band TFBAR filter with a bandwidth of 60 MHz is varied from 1.779 to 1.762 GHz (17 MHz shift).
Keywords :
Band pass filters; Electrodes; Fabrication; Film bulk acoustic resonators; Heating; Personal communication networks; Radio frequency; Resonator filters; Sputtering; Tuning;
Conference_Titel :
Microwave Conference, 2004. 34th European
Conference_Location :
Amsterdam, The Netherlands
Print_ISBN :
1-58053-992-0
