DocumentCode
430828
Title
Improvement of cathode life of pierce gun using for the deposition of MgO protection layer in plasma display
Author
Chou, Kuo-Ching
Author_Institution
PDP Panel Manuf. & Technol. Div., Chunghwa Picture Tubes, Taoyuan, Taiwan
fYear
2004
fDate
6-10 Sept. 2004
Firstpage
401
Lastpage
402
Abstract
To improve the cathode life of pierce gun of evaporator used for deposition of MgO thin film as a protection layer in ac-PDPs, various operation conditions of pierce gun including vacuum pressure, deposition beam current and the erosion depth of cathode resulted from ion bombardment were studied. According to the experimental results, higher pressure and higher beam current results in a shorter cathode life. In addition, by reducing the spot size and deposition beam current through a modified focus lens of pierce gun system, a longer cathode life can be achieved.
Keywords
cathodes; coating techniques; magnesium compounds; plasma displays; MgO; ac-PDP; cathode life; deposition beam current; erosion depth; ion bombardment; modified focus lens; pierce gun; plasma display; protection layer; thin film; vacuum pressure; Anodes; Cathodes; Coils; Electron beams; Flat panel displays; Lenses; Manufacturing; Plasma displays; Protection; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference, 2004. Proceedings. IVESC 2004. The 5th International
Print_ISBN
0-7803-8437-7
Type
conf
DOI
10.1109/IVESC.2004.1414292
Filename
1414292
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