Title :
Improvement of cathode life of pierce gun using for the deposition of MgO protection layer in plasma display
Author_Institution :
PDP Panel Manuf. & Technol. Div., Chunghwa Picture Tubes, Taoyuan, Taiwan
Abstract :
To improve the cathode life of pierce gun of evaporator used for deposition of MgO thin film as a protection layer in ac-PDPs, various operation conditions of pierce gun including vacuum pressure, deposition beam current and the erosion depth of cathode resulted from ion bombardment were studied. According to the experimental results, higher pressure and higher beam current results in a shorter cathode life. In addition, by reducing the spot size and deposition beam current through a modified focus lens of pierce gun system, a longer cathode life can be achieved.
Keywords :
cathodes; coating techniques; magnesium compounds; plasma displays; MgO; ac-PDP; cathode life; deposition beam current; erosion depth; ion bombardment; modified focus lens; pierce gun; plasma display; protection layer; thin film; vacuum pressure; Anodes; Cathodes; Coils; Electron beams; Flat panel displays; Lenses; Manufacturing; Plasma displays; Protection; Sputtering;
Conference_Titel :
Vacuum Electron Sources Conference, 2004. Proceedings. IVESC 2004. The 5th International
Print_ISBN :
0-7803-8437-7
DOI :
10.1109/IVESC.2004.1414292