Title :
A new and simple concept for self-aligned hybrid integration in silicon on insulator (SOI)
Author :
Mitze, T. ; Schnarrenberger, M. ; Zimmermann, L. ; Bruns, J. ; Fidorra, F. ; Kreissl, J. ; Janiak, K. ; Heidrich, H. ; Petermann, K.
Author_Institution :
Institut fur Hochfrequenz- und Halbleiter-Systemtechnologien, Technische Univ. Berlin, Germany
fDate :
29 Sept.-1 Oct. 2004
Abstract :
A concept for a SOI motherboard is introduced. AuSn solder technology is used for hybrid integration. The device adjustment on the board is realised by passive self-alignment. First results on fabricated boards are very encouraging.
Keywords :
integrated optoelectronics; silicon-on-insulator; soldering; AuSn; AuSn solder technology; SOI motherboard; self-aligned hybrid integration; silicon on insulator; Etching; High speed optical techniques; Integrated optics; Optical devices; Optical filters; Optical materials; Optical receivers; Optical transmitters; Optical waveguides; Silicon on insulator technology;
Conference_Titel :
Group IV Photonics, 2004. First IEEE International Conference on
Print_ISBN :
0-7803-8474-1
DOI :
10.1109/GROUP4.2004.1416719
