A cMUT linear array used as echographic probe: fabrication, characterization, and images

We report the design, the fabrication process, and the characterization of a 64-element ultrasonic transducer array based on the electrostatic effect and realized by silicon micromachined technology. These new devices are usually called capacitive micromachined ultrasonic transducers (cMUT). Using this transducer, we developed a probe for application in medical imaging. The probe was used in conjunction with a commercial echographic system to obtain images of echographic phantoms and of in vivo human body. Good echographic images of a test object and of internal organs of the human body were obtained, demonstrating the practical possibility to use the developed technology to make cMUT echographic probes.