Title :
A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer
Author :
Kanda, T. ; Makino, A. ; Suzumori, K. ; Morita, T. ; Kurosawa, M.K.
Author_Institution :
Fac. of Eng., Okayama Univ., Japan
Abstract :
A micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. A cylindrically shaped bulk piezoelectric transducer, with diameter 0.8 mm and height 2.2 mm, was developed as the stator transducer for a traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, with diameter of 2.0 mm and height of 5.9 mm, using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
Keywords :
micromotors; piezoelectric actuators; piezoelectric transducers; ultrasonic motors; 0.8 mm; 2.0 mm; 2.2 mm; 5.9 mm; cylindrical micro ultrasonic motor; micro-machined bulk piezoelectric transducer; piezoelectric actuator; stator transducer; traveling wave type ultrasonic motor; ultrasonic micromotor; Acceleration; Mechanical systems; Micromotors; Piezoelectric transducers; Rotors; Shafts; Springs; Stators; Torque; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2004 IEEE
Print_ISBN :
0-7803-8412-1
DOI :
10.1109/ULTSYM.2004.1418028
